TY - GEN
T1 - Brownian diffusion analysis for nano-abrasives in CMP slurry by using fluorescence polarization method
AU - Hayashi, Terutake
AU - Toshiki, Seri
AU - Kurokawa, Syuhei
N1 - Funding Information:
This research was partly supported by Japan Society for the Promotion of Science (JSPS) Grants-in-Aid for Scientific Research Grants-in-Aid for Scientific Research (Numbers 24656088).
Publisher Copyright:
© 2015 American Vacuum Society.
PY - 2016/2/17
Y1 - 2016/2/17
N2 - The translational diffusion coefficient analysis with help of the rotational diffusion coefficient analysis is applied to determine the particle size distribution (PSD) of abrasive particles in slurry. The fluorescence anisotropy analysis (FPA) can determine the integration of the temperature over the viscosity for nano-area. In this paper, we perform the fundamental experiment to evaluate the viscosity of the solvent by using FPA and verify the feasibility to determine PSD from both the translational diffusion coefficient and the rotational diffusion coefficient.
AB - The translational diffusion coefficient analysis with help of the rotational diffusion coefficient analysis is applied to determine the particle size distribution (PSD) of abrasive particles in slurry. The fluorescence anisotropy analysis (FPA) can determine the integration of the temperature over the viscosity for nano-area. In this paper, we perform the fundamental experiment to evaluate the viscosity of the solvent by using FPA and verify the feasibility to determine PSD from both the translational diffusion coefficient and the rotational diffusion coefficient.
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M3 - Conference contribution
AN - SCOPUS:84964452818
T3 - 2015 International Conference on Planarization/CMP Technology, ICPT 2015
BT - 2015 International Conference on Planarization/CMP Technology, ICPT 2015
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - International Conference on Planarization/CMP Technology, ICPT 2015
Y2 - 30 September 2015 through 2 October 2015
ER -