Bonding of LINBO3 thin film on Si substrate using laser irradiation

Hiroki Kawano; Ryo Takigawa; Hiroshi Ikenoue; Tanemasa Asano

doi:10.1109/MOC.2015.7416527

Bonding of LINBO3 thin film on Si substrate using laser irradiation

Hiroki Kawano
, Ryo Takigawa
, Hiroshi Ikenoue
, Tanemasa Asano

Integrated Electronic Systems

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Preparation of lithium niobate thin-film on silicon is demonstrated. The process employed is composed of mechanical thinning of the lithium niobate and bonding by using laser irradiation to the face-to-face interface of the two materials. The process is performed in the ambient air while keeping the wafers at room temperature.

Original language	English
Title of host publication	MOC 2015 - Technical Digest of 20th Microoptics Conference
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9784863485433
DOIs	https://doi.org/10.1109/MOC.2015.7416527
Publication status	Published - Feb 23 2016
Event	20th Microoptics Conference, MOC 2015 - Fukuoka, Japan Duration: Oct 25 2015 → Oct 28 2015

Publication series

Name	MOC 2015 - Technical Digest of 20th Microoptics Conference

Other

Other	20th Microoptics Conference, MOC 2015
Country/Territory	Japan
City	Fukuoka
Period	10/25/15 → 10/28/15

All Science Journal Classification (ASJC) codes

Atomic and Molecular Physics, and Optics
Electronic, Optical and Magnetic Materials

Access to Document

10.1109/MOC.2015.7416527

Cite this

Bonding of LINBO3 thin film on Si substrate using laser irradiation. / Kawano, Hiroki; Takigawa, Ryo; Ikenoue, Hiroshi et al.
MOC 2015 - Technical Digest of 20th Microoptics Conference. Institute of Electrical and Electronics Engineers Inc., 2016. 7416527 (MOC 2015 - Technical Digest of 20th Microoptics Conference).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kawano, H, Takigawa, R, Ikenoue, H & Asano, T 2016, Bonding of LINBO3 thin film on Si substrate using laser irradiation. in MOC 2015 - Technical Digest of 20th Microoptics Conference., 7416527, MOC 2015 - Technical Digest of 20th Microoptics Conference, Institute of Electrical and Electronics Engineers Inc., 20th Microoptics Conference, MOC 2015, Fukuoka, Japan, 10/25/15. https://doi.org/10.1109/MOC.2015.7416527

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abstract = "Preparation of lithium niobate thin-film on silicon is demonstrated. The process employed is composed of mechanical thinning of the lithium niobate and bonding by using laser irradiation to the face-to-face interface of the two materials. The process is performed in the ambient air while keeping the wafers at room temperature.",

author = "Hiroki Kawano and Ryo Takigawa and Hiroshi Ikenoue and Tanemasa Asano",

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AU - Kawano, Hiroki

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AU - Ikenoue, Hiroshi

AU - Asano, Tanemasa

PY - 2016/2/23

Y1 - 2016/2/23

N2 - Preparation of lithium niobate thin-film on silicon is demonstrated. The process employed is composed of mechanical thinning of the lithium niobate and bonding by using laser irradiation to the face-to-face interface of the two materials. The process is performed in the ambient air while keeping the wafers at room temperature.

AB - Preparation of lithium niobate thin-film on silicon is demonstrated. The process employed is composed of mechanical thinning of the lithium niobate and bonding by using laser irradiation to the face-to-face interface of the two materials. The process is performed in the ambient air while keeping the wafers at room temperature.

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DO - 10.1109/MOC.2015.7416527

M3 - Conference contribution

AN - SCOPUS:84969567333

T3 - MOC 2015 - Technical Digest of 20th Microoptics Conference

BT - MOC 2015 - Technical Digest of 20th Microoptics Conference

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 20th Microoptics Conference, MOC 2015

Y2 - 25 October 2015 through 28 October 2015

ER -

Bonding of LINBO3 thin film on Si substrate using laser irradiation

Abstract

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All Science Journal Classification (ASJC) codes

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