Abstract
Recently, the effective spacial resolution of advanced scanning electron microscope (SEM) has been improved remarkably, especially under very low accelerating voltages. Moreover, it is possible to obtain easily various microstructural information by using several improved detectors. In this paper, the equipment configuration and the distinctive features of the advanced SEM are explained briefly, and then the practical applications using the advanced SEM are presented.
| Original language | English |
|---|---|
| Pages (from-to) | 619-624 |
| Number of pages | 6 |
| Journal | kobunshi |
| Volume | 63 |
| Issue number | 9 |
| Publication status | Published - Sept 1 2014 |
| Externally published | Yes |
All Science Journal Classification (ASJC) codes
- Chemical Engineering(all)