Axial distribution of a VHF H2 plasma produced by a narrow gap discharge

Kuan Chen Chen, Chia Fu Chen, Cheng Yang Lien, Kuo Feng Chiu, Jen Bin Shi, Yu Jer Tsai, Ting Kuei Lien, Kohei Ogiwara, Kiichiro Uchino, Yoshinobu Kawai

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

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Physics