In this work, we have demonstrated a hybrid silicon/polymer ring resonator electro-optic (EO) modulator with a temperature-independent modulation. The waveguide consisted of an ultrathin silicon core with an EO polymer cladding. Using ultrathin silicon is advantageous, as it allows a reduction in the side-wall scattering loss and also offers excellent light distribution to enable athermal operation. With a radius of 60 μm, the ring exhibited a 9.7 dB extinction depth and a Q value of 1.25 × 104. After poling of the EO polymer, the ring resonator functioned well as an EO modulator and operated in a stable manner between 25 and 55 °C.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Electrical and Electronic Engineering