Application of mems technique for micro gear metrology

Syuhei Kurokawa, Yoji Umezaki, Morihisa Hoga, Ryohei Ishimaru, Osamu Ohnishi, Toshiro Doi

Research output: Chapter in Book/Report/Conference proceedingConference contribution


We try to measure direct transmission of rotational motion between a gear pair, which is called transmission error, without knowing the tooth flank accuracy of each gear. In transmission error measurement, the rotational angle of the shaft of each gear is measured with a pair of rotary encoders. For micro gear engagement, the center distance between a pair of gears is very small, so the rotary encoders have to be small as well as micro gears. A grating disk with a small diameter for a micro rotary encoder must be designed and manufactured. In machining process, one of the MEMS technique is applied. Patterning accuracy is examined in detail.

Original languageEnglish
Title of host publicationPower Transmissions - Proceedings of the 4th International Conference
EditorsGeorge Dobre
PublisherSpringer Netherlands
Number of pages10
ISBN (Print)9789400765573
Publication statusPublished - Jan 1 2013
Event4th International Conference on Power Transmissions, PT 2012 - Sinaia
Duration: Jun 20 2012Jun 23 2012

Publication series

NameMechanisms and Machine Science
ISSN (Print)2211-0984
ISSN (Electronic)2211-0992


Other4th International Conference on Power Transmissions, PT 2012

All Science Journal Classification (ASJC) codes

  • Mechanics of Materials
  • Mechanical Engineering


Dive into the research topics of 'Application of mems technique for micro gear metrology'. Together they form a unique fingerprint.

Cite this