Analysis of tungsten film electrodeposited from a ZnCl2-NaCl-KCl melt

Koji Nitta; Shinji Inazawa; Kazunori Okada; Hironori Nakajima; Toshiyuki Nohira; Rika Hagiwara

doi:10.1016/j.electacta.2007.01.032

Analysis of tungsten film electrodeposited from a ZnCl₂-NaCl-KCl melt

Koji Nitta, Shinji Inazawa, Kazunori Okada, Hironori Nakajima, Toshiyuki Nohira, Rika Hagiwara

Research output: Contribution to journal › Article › peer-review

28 Citations (Scopus)

Abstract

Microparts for micro-electro-mechanical systems (MEMS) are becoming increasingly important, and the Lithographie Galvanoformung Abformung (LIGA) process for producing such parts is attracting attention [1]. However, as this process requires the step of electroplating in aqueous solution, only copper, nickel and their alloys can be used because of the limit of the potential window of water. We have been attempting to apply the electroplating of refractory metals in molten salts to the LIGA process or to the surface coating of conventional LIGA microparts in order to give higher strength and heat resistance for the microparts. Herein we report the characteristics of a tungsten film electrodeposited from a ZnCl₂-NaCl-KCl melt at 250 °C.

Original language	English
Pages (from-to)	20-23
Number of pages	4
Journal	Electrochimica Acta
Volume	53
Issue number	1
DOIs	https://doi.org/10.1016/j.electacta.2007.01.032
Publication status	Published - Nov 20 2007
Externally published	Yes

All Science Journal Classification (ASJC) codes

Chemical Engineering(all)
Electrochemistry

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10.1016/j.electacta.2007.01.032

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title = "Analysis of tungsten film electrodeposited from a ZnCl2-NaCl-KCl melt",

abstract = "Microparts for micro-electro-mechanical systems (MEMS) are becoming increasingly important, and the Lithographie Galvanoformung Abformung (LIGA) process for producing such parts is attracting attention [1]. However, as this process requires the step of electroplating in aqueous solution, only copper, nickel and their alloys can be used because of the limit of the potential window of water. We have been attempting to apply the electroplating of refractory metals in molten salts to the LIGA process or to the surface coating of conventional LIGA microparts in order to give higher strength and heat resistance for the microparts. Herein we report the characteristics of a tungsten film electrodeposited from a ZnCl2-NaCl-KCl melt at 250 °C.",

author = "Koji Nitta and Shinji Inazawa and Kazunori Okada and Hironori Nakajima and Toshiyuki Nohira and Rika Hagiwara",

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AU - Nitta, Koji

AU - Inazawa, Shinji

AU - Okada, Kazunori

AU - Nakajima, Hironori

AU - Nohira, Toshiyuki

AU - Hagiwara, Rika

N1 - Funding Information: A part of this study was supported by the Industrial Technology Research Grant Program in 2003 from the New Energy and Industrial Technology Development Organization (NEDO) of Japan.

PY - 2007/11/20

Y1 - 2007/11/20

N2 - Microparts for micro-electro-mechanical systems (MEMS) are becoming increasingly important, and the Lithographie Galvanoformung Abformung (LIGA) process for producing such parts is attracting attention [1]. However, as this process requires the step of electroplating in aqueous solution, only copper, nickel and their alloys can be used because of the limit of the potential window of water. We have been attempting to apply the electroplating of refractory metals in molten salts to the LIGA process or to the surface coating of conventional LIGA microparts in order to give higher strength and heat resistance for the microparts. Herein we report the characteristics of a tungsten film electrodeposited from a ZnCl2-NaCl-KCl melt at 250 °C.

AB - Microparts for micro-electro-mechanical systems (MEMS) are becoming increasingly important, and the Lithographie Galvanoformung Abformung (LIGA) process for producing such parts is attracting attention [1]. However, as this process requires the step of electroplating in aqueous solution, only copper, nickel and their alloys can be used because of the limit of the potential window of water. We have been attempting to apply the electroplating of refractory metals in molten salts to the LIGA process or to the surface coating of conventional LIGA microparts in order to give higher strength and heat resistance for the microparts. Herein we report the characteristics of a tungsten film electrodeposited from a ZnCl2-NaCl-KCl melt at 250 °C.

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Analysis of tungsten film electrodeposited from a ZnCl₂-NaCl-KCl melt

Abstract

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