Analysis of the thermal and acoustic properties of ion-implanted diamondlike carbon films using the transient reflecting grating technique

Qing Shen; Akira Harata; Tsuguo Sawada

doi:10.1063/1.358898

Analysis of the thermal and acoustic properties of ion-implanted diamondlike carbon films using the transient reflecting grating technique

Qing Shen, Akira Harata, Tsuguo Sawada

Research output: Contribution to journal › Article › peer-review

19 Citations (Scopus)

Abstract

The transient reflecting grating (TRG) technique was applied to evaluate both nitrogen-ion-implanted and nonimplanted thin-film coatings (thickness: 40 nm) of diamondlike carbon (DLC) on metallic multilayered substrates. Different TRG responses corresponding to the different nitrogen ion doses were observed. Hypersonic surface wave velocities as well as the thermal diffusivities were obtained with a variety of grating spacings. Effective elastic moduli (Young's moduli) for the DLC coatings were given by using a theoretical treatment with a model. Nitrogen ion implantation hardened the DLC coating.

Original language	English
Pages (from-to)	1488-1491
Number of pages	4
Journal	Journal of Applied Physics
Volume	77
Issue number	4
DOIs	https://doi.org/10.1063/1.358898
Publication status	Published - 1995
Externally published	Yes

All Science Journal Classification (ASJC) codes

Physics and Astronomy(all)

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10.1063/1.358898

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abstract = "The transient reflecting grating (TRG) technique was applied to evaluate both nitrogen-ion-implanted and nonimplanted thin-film coatings (thickness: 40 nm) of diamondlike carbon (DLC) on metallic multilayered substrates. Different TRG responses corresponding to the different nitrogen ion doses were observed. Hypersonic surface wave velocities as well as the thermal diffusivities were obtained with a variety of grating spacings. Effective elastic moduli (Young's moduli) for the DLC coatings were given by using a theoretical treatment with a model. Nitrogen ion implantation hardened the DLC coating.",

author = "Qing Shen and Akira Harata and Tsuguo Sawada",

year = "1995",

doi = "10.1063/1.358898",

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AU - Shen, Qing

AU - Harata, Akira

AU - Sawada, Tsuguo

PY - 1995

Y1 - 1995

N2 - The transient reflecting grating (TRG) technique was applied to evaluate both nitrogen-ion-implanted and nonimplanted thin-film coatings (thickness: 40 nm) of diamondlike carbon (DLC) on metallic multilayered substrates. Different TRG responses corresponding to the different nitrogen ion doses were observed. Hypersonic surface wave velocities as well as the thermal diffusivities were obtained with a variety of grating spacings. Effective elastic moduli (Young's moduli) for the DLC coatings were given by using a theoretical treatment with a model. Nitrogen ion implantation hardened the DLC coating.

AB - The transient reflecting grating (TRG) technique was applied to evaluate both nitrogen-ion-implanted and nonimplanted thin-film coatings (thickness: 40 nm) of diamondlike carbon (DLC) on metallic multilayered substrates. Different TRG responses corresponding to the different nitrogen ion doses were observed. Hypersonic surface wave velocities as well as the thermal diffusivities were obtained with a variety of grating spacings. Effective elastic moduli (Young's moduli) for the DLC coatings were given by using a theoretical treatment with a model. Nitrogen ion implantation hardened the DLC coating.

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JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 4

ER -

Analysis of the thermal and acoustic properties of ion-implanted diamondlike carbon films using the transient reflecting grating technique

Abstract

All Science Journal Classification (ASJC) codes

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