Analysis of ion implanted diamond-like-carbon films using laser-induced transient reflecting grating technique

Q. Shen; A. Harata; T. Sawada

doi:10.1051/jp4:1994755

Analysis of ion implanted diamond-like-carbon films using laser-induced transient reflecting grating technique

Q. Shen, A. Harata, T. Sawada

Research output: Contribution to journal › Conference article › peer-review

Abstract

Laser-induced transient reflecting grating (TRG) technique was applied to measure both nitrogen-ion-implanted and nonimplanted thin-film coatings (thickness, 40nm) of diamond-like-carbon (DLC). Different TRG responses corresponding to the different samples with a variety of nitrogen-ion implantation doses were observed and the hypersonic surface acoustic wave velocities were obtained with a variety of wavelengths. A phenomenon was observed that the SAW velocity of the implanted DLC coating with higher dose became larger than that of the nonimplanted sample.

Original language	English
Pages (from-to)	C7-233-236
Journal	Journal De Physique
Volume	4
Issue number	7
DOIs	https://doi.org/10.1051/jp4:1994755
Publication status	Published - 1994
Externally published	Yes
Event	Proceedings of the 8th International Topical Meeting on Photoacoustic and Photothermal Phenomena - Guadeloupe, Fr Duration: Jan 22 1994 → Jan 25 1994

All Science Journal Classification (ASJC) codes

Physics and Astronomy(all)

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10.1051/jp4:1994755

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title = "Analysis of ion implanted diamond-like-carbon films using laser-induced transient reflecting grating technique",

abstract = "Laser-induced transient reflecting grating (TRG) technique was applied to measure both nitrogen-ion-implanted and nonimplanted thin-film coatings (thickness, 40nm) of diamond-like-carbon (DLC). Different TRG responses corresponding to the different samples with a variety of nitrogen-ion implantation doses were observed and the hypersonic surface acoustic wave velocities were obtained with a variety of wavelengths. A phenomenon was observed that the SAW velocity of the implanted DLC coating with higher dose became larger than that of the nonimplanted sample.",

author = "Q. Shen and A. Harata and T. Sawada",

year = "1994",

doi = "10.1051/jp4:1994755",

language = "English",

volume = "4",

pages = "C7--233--236",

journal = "Journal De Physique",

issn = "0302-0738",

publisher = "Societe Francaise De Physique",

number = "7",

note = "Proceedings of the 8th International Topical Meeting on Photoacoustic and Photothermal Phenomena ; Conference date: 22-01-1994 Through 25-01-1994",

}

TY - JOUR

T1 - Analysis of ion implanted diamond-like-carbon films using laser-induced transient reflecting grating technique

AU - Shen, Q.

AU - Harata, A.

AU - Sawada, T.

PY - 1994

Y1 - 1994

N2 - Laser-induced transient reflecting grating (TRG) technique was applied to measure both nitrogen-ion-implanted and nonimplanted thin-film coatings (thickness, 40nm) of diamond-like-carbon (DLC). Different TRG responses corresponding to the different samples with a variety of nitrogen-ion implantation doses were observed and the hypersonic surface acoustic wave velocities were obtained with a variety of wavelengths. A phenomenon was observed that the SAW velocity of the implanted DLC coating with higher dose became larger than that of the nonimplanted sample.

AB - Laser-induced transient reflecting grating (TRG) technique was applied to measure both nitrogen-ion-implanted and nonimplanted thin-film coatings (thickness, 40nm) of diamond-like-carbon (DLC). Different TRG responses corresponding to the different samples with a variety of nitrogen-ion implantation doses were observed and the hypersonic surface acoustic wave velocities were obtained with a variety of wavelengths. A phenomenon was observed that the SAW velocity of the implanted DLC coating with higher dose became larger than that of the nonimplanted sample.

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UR - http://www.scopus.com/inward/citedby.url?scp=0028477442&partnerID=8YFLogxK

U2 - 10.1051/jp4:1994755

DO - 10.1051/jp4:1994755

M3 - Conference article

AN - SCOPUS:0028477442

SN - 0302-0738

VL - 4

SP - C7-233-236

JO - Journal De Physique

JF - Journal De Physique

IS - 7

T2 - Proceedings of the 8th International Topical Meeting on Photoacoustic and Photothermal Phenomena

Y2 - 22 January 1994 through 25 January 1994

ER -

Analysis of ion implanted diamond-like-carbon films using laser-induced transient reflecting grating technique

Abstract

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