Analysis of cluster growth in magnetron-sputtering metal-cluster source by optical emission spectroscopy

Satoshi Kono; Masashi Arakawa; Akira Terasaki

doi:10.1246/cl.190727

Analysis of cluster growth in magnetron-sputtering metal-cluster source by optical emission spectroscopy

Satoshi Kono, Masashi Arakawa, Akira Terasaki

Physical Chemistry

Research output: Contribution to journal › Article › peer-review

Abstract

We investigate cluster-growth processes in a magnetronsputtering cluster source by employing silver as a target metal. An optical emission spectrum of discharge plasma is measured along with a mass spectrum of silver cluster cations as a function of discharge power. The former quantifies the number of silver atoms sputtered, while the latter provides a size distribution of clusters produced. A scenario of cluster growth is discussed based on a simple statistical model.

Original language	English
Pages (from-to)	1537-1540
Number of pages	4
Journal	Chemistry Letters
Volume	48
Issue number	12
DOIs	https://doi.org/10.1246/cl.190727
Publication status	Published - 2019

All Science Journal Classification (ASJC) codes

Chemistry(all)

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10.1246/cl.190727

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title = "Analysis of cluster growth in magnetron-sputtering metal-cluster source by optical emission spectroscopy",

abstract = "We investigate cluster-growth processes in a magnetronsputtering cluster source by employing silver as a target metal. An optical emission spectrum of discharge plasma is measured along with a mass spectrum of silver cluster cations as a function of discharge power. The former quantifies the number of silver atoms sputtered, while the latter provides a size distribution of clusters produced. A scenario of cluster growth is discussed based on a simple statistical model.",

author = "Satoshi Kono and Masashi Arakawa and Akira Terasaki",

note = "Funding Information: This work was supported by Grant-in-Aid for Scientific Research (A) (JP18H03901) from the Japan Society for Promotion of Science (JSPS). Publisher Copyright: {\textcopyright} 2019 The Chemical Society of Japan.",

year = "2019",

doi = "10.1246/cl.190727",

language = "English",

volume = "48",

pages = "1537--1540",

journal = "Chemistry Letters",

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T1 - Analysis of cluster growth in magnetron-sputtering metal-cluster source by optical emission spectroscopy

AU - Kono, Satoshi

AU - Arakawa, Masashi

AU - Terasaki, Akira

N1 - Funding Information: This work was supported by Grant-in-Aid for Scientific Research (A) (JP18H03901) from the Japan Society for Promotion of Science (JSPS). Publisher Copyright: © 2019 The Chemical Society of Japan.

PY - 2019

Y1 - 2019

N2 - We investigate cluster-growth processes in a magnetronsputtering cluster source by employing silver as a target metal. An optical emission spectrum of discharge plasma is measured along with a mass spectrum of silver cluster cations as a function of discharge power. The former quantifies the number of silver atoms sputtered, while the latter provides a size distribution of clusters produced. A scenario of cluster growth is discussed based on a simple statistical model.

AB - We investigate cluster-growth processes in a magnetronsputtering cluster source by employing silver as a target metal. An optical emission spectrum of discharge plasma is measured along with a mass spectrum of silver cluster cations as a function of discharge power. The former quantifies the number of silver atoms sputtered, while the latter provides a size distribution of clusters produced. A scenario of cluster growth is discussed based on a simple statistical model.

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JO - Chemistry Letters

JF - Chemistry Letters

IS - 12

ER -

Analysis of cluster growth in magnetron-sputtering metal-cluster source by optical emission spectroscopy

Abstract

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