All-Nb thin film microbridge-type Josephson junction for submillimeter-wave detection

Nobumitsu Hirose; Yuichi Harada; Matsuo Sekine; Shigeru Yoshimori; Mitsuo Kawamura

doi:10.1016/0020-0891(93)90078-L

All-Nb thin film microbridge-type Josephson junction for submillimeter-wave detection

Nobumitsu Hirose, Yuichi Harada, Matsuo Sekine, Shigeru Yoshimori, Mitsuo Kawamura

Research output: Contribution to journal › Article › peer-review

Abstract

A copolymer of methyl methacrylate (MMA) and 3-triethoxysilylpropyl methacrylate (ESPMA) was proposed as a positive-working electron beam (EB) resist of a new type. It was found that it had 4-10 times the resistance of polymethylmethacrylate (PMMA) against CBrF₃ plasma damage. The mechanism of etching Nb in reactive-ion-etching (RIE) was deciphered. Using the new EB resist and nanometer process technology, an all-Nb thin film microbridge was fabricated. It shows the a.c. Josephson effect, i.e. the Shapiro steps upto the 11th were observed under millimeter-wave (70 GHz) radiation. In addition the coherently working performance of the series array of these thin-film microbridges were observed definitively.

Original language	English
Pages (from-to)	445-455
Number of pages	11
Journal	Infrared Physics
Volume	34
Issue number	5
DOIs	https://doi.org/10.1016/0020-0891(93)90078-L
Publication status	Published - Oct 1993
Externally published	Yes

All Science Journal Classification (ASJC) codes

Engineering(all)

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10.1016/0020-0891(93)90078-L

Cite this

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title = "All-Nb thin film microbridge-type Josephson junction for submillimeter-wave detection",

abstract = "A copolymer of methyl methacrylate (MMA) and 3-triethoxysilylpropyl methacrylate (ESPMA) was proposed as a positive-working electron beam (EB) resist of a new type. It was found that it had 4-10 times the resistance of polymethylmethacrylate (PMMA) against CBrF3 plasma damage. The mechanism of etching Nb in reactive-ion-etching (RIE) was deciphered. Using the new EB resist and nanometer process technology, an all-Nb thin film microbridge was fabricated. It shows the a.c. Josephson effect, i.e. the Shapiro steps upto the 11th were observed under millimeter-wave (70 GHz) radiation. In addition the coherently working performance of the series array of these thin-film microbridges were observed definitively.",

author = "Nobumitsu Hirose and Yuichi Harada and Matsuo Sekine and Shigeru Yoshimori and Mitsuo Kawamura",

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T1 - All-Nb thin film microbridge-type Josephson junction for submillimeter-wave detection

AU - Hirose, Nobumitsu

AU - Harada, Yuichi

AU - Sekine, Matsuo

AU - Yoshimori, Shigeru

AU - Kawamura, Mitsuo

PY - 1993/10

Y1 - 1993/10

N2 - A copolymer of methyl methacrylate (MMA) and 3-triethoxysilylpropyl methacrylate (ESPMA) was proposed as a positive-working electron beam (EB) resist of a new type. It was found that it had 4-10 times the resistance of polymethylmethacrylate (PMMA) against CBrF3 plasma damage. The mechanism of etching Nb in reactive-ion-etching (RIE) was deciphered. Using the new EB resist and nanometer process technology, an all-Nb thin film microbridge was fabricated. It shows the a.c. Josephson effect, i.e. the Shapiro steps upto the 11th were observed under millimeter-wave (70 GHz) radiation. In addition the coherently working performance of the series array of these thin-film microbridges were observed definitively.

AB - A copolymer of methyl methacrylate (MMA) and 3-triethoxysilylpropyl methacrylate (ESPMA) was proposed as a positive-working electron beam (EB) resist of a new type. It was found that it had 4-10 times the resistance of polymethylmethacrylate (PMMA) against CBrF3 plasma damage. The mechanism of etching Nb in reactive-ion-etching (RIE) was deciphered. Using the new EB resist and nanometer process technology, an all-Nb thin film microbridge was fabricated. It shows the a.c. Josephson effect, i.e. the Shapiro steps upto the 11th were observed under millimeter-wave (70 GHz) radiation. In addition the coherently working performance of the series array of these thin-film microbridges were observed definitively.

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JO - Infrared Physics

JF - Infrared Physics

IS - 5

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All-Nb thin film microbridge-type Josephson junction for submillimeter-wave detection

Abstract

All Science Journal Classification (ASJC) codes

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