A Thomson scattering measurement system based on an infrared laser

Mark D. Bowden; Hiroyasu Kudo; Kiichiro Uchino; Katsunori Muraoka; Masanori Noguchi

doi:10.1143/jjap.38.4924

A Thomson scattering measurement system based on an infrared laser

Mark D. Bowden, Hiroyasu Kudo, Kiichiro Uchino, Katsunori Muraoka, Masanori Noguchi

Electrical Engineering Sciences

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

A new Thomson scattering measurement system, using a 1.064 μm YAG laser as the radiation source, has been developed for the purpose of enabling measurement of electron properties to be made in glow discharge plasmas containing reactive gases. Initial measurements made using the new system in an inductively coupled plasma gave results which were comparable with those obtained using previous Thomson scattering systems that used visible lasers.

Original language	English
Pages (from-to)	4924-4925
Number of pages	2
Journal	Japanese Journal of Applied Physics
Volume	38
Issue number	8 B
DOIs	https://doi.org/10.1143/jjap.38.4924
Publication status	Published - Aug 15 1999

All Science Journal Classification (ASJC) codes

Engineering(all)
Physics and Astronomy(all)

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10.1143/jjap.38.4924

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abstract = "A new Thomson scattering measurement system, using a 1.064 μm YAG laser as the radiation source, has been developed for the purpose of enabling measurement of electron properties to be made in glow discharge plasmas containing reactive gases. Initial measurements made using the new system in an inductively coupled plasma gave results which were comparable with those obtained using previous Thomson scattering systems that used visible lasers.",

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AU - Noguchi, Masanori

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A Thomson scattering measurement system based on an infrared laser

Abstract

All Science Journal Classification (ASJC) codes

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