A study on fluorescence polarization method for analyzing diffusional movement of abrasive grain in CMP slurry

Terutake Hayashi; Toshiki Seri; Syuhei Kurokawa

A study on fluorescence polarization method for analyzing diffusional movement of abrasive grain in CMP slurry

Terutake Hayashi, Toshiki Seri, Syuhei Kurokawa

Manufacturing Process

Research output: Contribution to conference › Paper › peer-review

Abstract

In this paper, we suggest a novel evaluation method of translational Brownian motion of nano-abrasives in CMP slurry. The slurry is complex composite and the viscosity is not uniform during the translational motion of nano-abrasives. We apply the fluorescence anisotropy analysis to measure the integration of viscosity. The viscosity for the area where the abrasive nano-particles passing through in their translational motion is integrated in order to determine the average of the translational diffusion coefficient.

Original language	English
Publication status	Published - Oct 18 2015
Event	8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015 - Kyoto, Japan Duration: Oct 18 2015 → Oct 22 2015

Other

Other	8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015
Country/Territory	Japan
City	Kyoto
Period	10/18/15 → 10/22/15

All Science Journal Classification (ASJC) codes

Industrial and Manufacturing Engineering

Cite this

@conference{02a581d59d82444fb1fde5dbad23dab4,

title = "A study on fluorescence polarization method for analyzing diffusional movement of abrasive grain in CMP slurry",

abstract = "In this paper, we suggest a novel evaluation method of translational Brownian motion of nano-abrasives in CMP slurry. The slurry is complex composite and the viscosity is not uniform during the translational motion of nano-abrasives. We apply the fluorescence anisotropy analysis to measure the integration of viscosity. The viscosity for the area where the abrasive nano-particles passing through in their translational motion is integrated in order to determine the average of the translational diffusion coefficient.",

author = "Terutake Hayashi and Toshiki Seri and Syuhei Kurokawa",

note = "Funding Information: This research was partly supported by Japan Society for the Promotion of Science (JSPS) Grants-in-Aid for Scientific Research Grants-in-Aid for Scientific Research (No.24656088).; 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015 ; Conference date: 18-10-2015 Through 22-10-2015",

year = "2015",

month = oct,

day = "18",

language = "English",

}

TY - CONF

T1 - A study on fluorescence polarization method for analyzing diffusional movement of abrasive grain in CMP slurry

AU - Hayashi, Terutake

AU - Seri, Toshiki

AU - Kurokawa, Syuhei

N1 - Funding Information: This research was partly supported by Japan Society for the Promotion of Science (JSPS) Grants-in-Aid for Scientific Research Grants-in-Aid for Scientific Research (No.24656088).

PY - 2015/10/18

Y1 - 2015/10/18

N2 - In this paper, we suggest a novel evaluation method of translational Brownian motion of nano-abrasives in CMP slurry. The slurry is complex composite and the viscosity is not uniform during the translational motion of nano-abrasives. We apply the fluorescence anisotropy analysis to measure the integration of viscosity. The viscosity for the area where the abrasive nano-particles passing through in their translational motion is integrated in order to determine the average of the translational diffusion coefficient.

AB - In this paper, we suggest a novel evaluation method of translational Brownian motion of nano-abrasives in CMP slurry. The slurry is complex composite and the viscosity is not uniform during the translational motion of nano-abrasives. We apply the fluorescence anisotropy analysis to measure the integration of viscosity. The viscosity for the area where the abrasive nano-particles passing through in their translational motion is integrated in order to determine the average of the translational diffusion coefficient.

UR - http://www.scopus.com/inward/record.url?scp=84974560568&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84974560568&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:84974560568

T2 - 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015

Y2 - 18 October 2015 through 22 October 2015

ER -

A study on fluorescence polarization method for analyzing diffusional movement of abrasive grain in CMP slurry

Abstract

Other

All Science Journal Classification (ASJC) codes

Other files and links

Fingerprint

Cite this