A micro laser Doppler velocimeter designed for a wafer-level packaging process

N. Morita; T. Akiyama; H. Nogami; Y. Hayashida; E. Higurashi; T. Ito; R. Sawada

doi:10.1109/TRANSDUCERS.2015.7180965

A micro laser Doppler velocimeter designed for a wafer-level packaging process

N. Morita, T. Akiyama, H. Nogami, Y. Hayashida, E. Higurashi, T. Ito, R. Sawada

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

We develop a micro laser Doppler velocimeter (μ-LDV), designed for fabrication via a wafer-level packaging process for small size and mass production. This sensor is only 1/10,000th the volume of typical commercial LDVs. We successfully performed velocity measurement of moving solid plates and a flowing liquid with suspended particles by FFT analyzing signals obtained by our proposed μ-LDV. It can measure the velocity of any material that by itself or by constituent particles - bubbles, cells, emulsion phases, etc. - can scatter irradiated light: examples include solids like aluminum and cardboard or fluids like water, oil, and air.

Original language	English
Title of host publication	2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	480-483
Number of pages	4
ISBN (Electronic)	9781479989553
DOIs	https://doi.org/10.1109/TRANSDUCERS.2015.7180965
Publication status	Published - Aug 5 2015
Event	18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, United States Duration: Jun 21 2015 → Jun 25 2015

Publication series

Name	2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

Other

Other	18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
Country/Territory	United States
City	Anchorage
Period	6/21/15 → 6/25/15

All Science Journal Classification (ASJC) codes

Instrumentation
Electrical and Electronic Engineering

Access to Document

10.1109/TRANSDUCERS.2015.7180965

Cite this

Morita, N., Akiyama, T., Nogami, H., Hayashida, Y., Higurashi, E., Ito, T., & Sawada, R. (2015). A micro laser Doppler velocimeter designed for a wafer-level packaging process. In 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 (pp. 480-483). Article 7180965 (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2015.7180965

A micro laser Doppler velocimeter designed for a wafer-level packaging process. / Morita, N.; Akiyama, T.; Nogami, H. et al.
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. Institute of Electrical and Electronics Engineers Inc., 2015. p. 480-483 7180965 (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Morita, N, Akiyama, T, Nogami, H, Hayashida, Y, Higurashi, E, Ito, T & Sawada, R 2015, A micro laser Doppler velocimeter designed for a wafer-level packaging process. in 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015., 7180965, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, Institute of Electrical and Electronics Engineers Inc., pp. 480-483, 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, Anchorage, United States, 6/21/15. https://doi.org/10.1109/TRANSDUCERS.2015.7180965

Morita N, Akiyama T, Nogami H, Hayashida Y, Higurashi E, Ito T et al. A micro laser Doppler velocimeter designed for a wafer-level packaging process. In 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. Institute of Electrical and Electronics Engineers Inc. 2015. p. 480-483. 7180965. (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015). doi: 10.1109/TRANSDUCERS.2015.7180965

Morita, N. ; Akiyama, T. ; Nogami, H. et al. / A micro laser Doppler velocimeter designed for a wafer-level packaging process. 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 480-483 (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015).

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A micro laser Doppler velocimeter designed for a wafer-level packaging process

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