A high-frequency, low-coupling 8-shaped differential inductor with patterned ground shield (PGS) is presented in this paper. The differential structure formed by two single-inductors in stepping order makes high-fSR (self-resonant-frequency) possible and it also suppresses the far-field magnetic coupling. A PGS structure not only maximizes the Q-factor but also improves simulation time and accuracy of EM-simulation. The test chip is implemented in TSMC 0.18um 1-poly, 6-metal CMOS process and the measurement results showed good match with EM-simulation.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Electrical and Electronic Engineering