A collective laser thomson scattering system for diagnostics of laser-produced plasmas for extreme ultraviolet light sources

Kentaro Tomita; Kazuki Nakayama; Kazuya Inoue; Atsushi Sunahara; Kiichiro Uchino

doi:10.7567/APEX.6.076101

A collective laser thomson scattering system for diagnostics of laser-produced plasmas for extreme ultraviolet light sources

Kentaro Tomita
, Kazuki Nakayama
, Kazuya Inoue
, Atsushi Sunahara
, Kiichiro Uchino

Electrical Engineering Sciences

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

Abstract

To develop a diagnostic system for laser-produced plasmas for extreme ultraviolet (EUV) light sources, collective laser Thomson scattering (LTS) was applied to laser-produced carbon plasmas to measure plasma parameters such as electron density (ne) and electron temperature (Te). Plasmas having parameters necessary for an EUV light source (ne = 10²⁴{10²⁵m ^-3, Te = 30{50 eV) were achieved, and these parameters were successfully evaluated by a pilot diagnostic system with errors below 10%. From these results, an LTS system for diagnostics of tin plasmas for real EUV light sources was designed.

Original language	English
Article number	076101
Journal	Applied Physics Express
Volume	6
Issue number	7
DOIs	https://doi.org/10.7567/APEX.6.076101
Publication status	Published - Jul 2013

All Science Journal Classification (ASJC) codes

General Engineering
General Physics and Astronomy

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10.7567/APEX.6.076101

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abstract = "To develop a diagnostic system for laser-produced plasmas for extreme ultraviolet (EUV) light sources, collective laser Thomson scattering (LTS) was applied to laser-produced carbon plasmas to measure plasma parameters such as electron density (ne) and electron temperature (Te). Plasmas having parameters necessary for an EUV light source (ne = 1024\{1025m -3, Te = 30\{50 eV) were achieved, and these parameters were successfully evaluated by a pilot diagnostic system with errors below 10\%. From these results, an LTS system for diagnostics of tin plasmas for real EUV light sources was designed.",

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AU - Tomita, Kentaro

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AU - Sunahara, Atsushi

AU - Uchino, Kiichiro

PY - 2013/7

Y1 - 2013/7

N2 - To develop a diagnostic system for laser-produced plasmas for extreme ultraviolet (EUV) light sources, collective laser Thomson scattering (LTS) was applied to laser-produced carbon plasmas to measure plasma parameters such as electron density (ne) and electron temperature (Te). Plasmas having parameters necessary for an EUV light source (ne = 1024{1025m -3, Te = 30{50 eV) were achieved, and these parameters were successfully evaluated by a pilot diagnostic system with errors below 10%. From these results, an LTS system for diagnostics of tin plasmas for real EUV light sources was designed.

AB - To develop a diagnostic system for laser-produced plasmas for extreme ultraviolet (EUV) light sources, collective laser Thomson scattering (LTS) was applied to laser-produced carbon plasmas to measure plasma parameters such as electron density (ne) and electron temperature (Te). Plasmas having parameters necessary for an EUV light source (ne = 1024{1025m -3, Te = 30{50 eV) were achieved, and these parameters were successfully evaluated by a pilot diagnostic system with errors below 10%. From these results, an LTS system for diagnostics of tin plasmas for real EUV light sources was designed.

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A collective laser thomson scattering system for diagnostics of laser-produced plasmas for extreme ultraviolet light sources

Abstract

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