A 20mΩcm2 600 V-class super junction MOSFET

Wataru Saito; Ichiro Omura; Satoshi Aida; Shigeo Koduki; Masaru Izumisawa; Hironori Yoshioka; Tsuneo Ogura

A 20mΩcm² 600 V-class super junction MOSFET

Wataru Saito, Ichiro Omura, Satoshi Aida, Shigeo Koduki, Masaru Izumisawa, Hironori Yoshioka, Tsuneo Ogura

Research output: Contribution to conference › Paper › peer-review

Abstract

Superjunction (SJ) MOSFETs with extremely low on-resistance and high avalanche withstanding capability have been designed and experimentally demonstrated. The p- and n-columns for the SJ structure are designed to reduce the on-resistance and to maximize both the breakdown voltage and the avalanche withstanding capability. The demonstrated SJ-MOSFET realized the lowest on-resistance of 20∼mΩcm² among previously reported 600 V-class SJ-MOSFETs. The device also withstands high avalanche current of 185∼A/cm².

Original language	English
Pages	459-462
Number of pages	4
Publication status	Published - 2004
Externally published	Yes
Event	Proceedings of the 16th International Symposium on Power Semiconductor Devices and ICs (ISPSD'04) - Kitakyushu, Japan Duration: May 24 2004 → May 27 2004

Conference

Conference	Proceedings of the 16th International Symposium on Power Semiconductor Devices and ICs (ISPSD'04)
Country/Territory	Japan
City	Kitakyushu
Period	5/24/04 → 5/27/04

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering

Cite this

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title = "A 20mΩcm2 600 V-class super junction MOSFET",

abstract = "Superjunction (SJ) MOSFETs with extremely low on-resistance and high avalanche withstanding capability have been designed and experimentally demonstrated. The p- and n-columns for the SJ structure are designed to reduce the on-resistance and to maximize both the breakdown voltage and the avalanche withstanding capability. The demonstrated SJ-MOSFET realized the lowest on-resistance of 20∼mΩcm2 among previously reported 600 V-class SJ-MOSFETs. The device also withstands high avalanche current of 185∼A/cm2.",

author = "Wataru Saito and Ichiro Omura and Satoshi Aida and Shigeo Koduki and Masaru Izumisawa and Hironori Yoshioka and Tsuneo Ogura",

year = "2004",

language = "English",

pages = "459--462",

note = "Proceedings of the 16th International Symposium on Power Semiconductor Devices and ICs (ISPSD'04) ; Conference date: 24-05-2004 Through 27-05-2004",

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TY - CONF

T1 - A 20mΩcm2 600 V-class super junction MOSFET

AU - Saito, Wataru

AU - Omura, Ichiro

AU - Aida, Satoshi

AU - Koduki, Shigeo

AU - Izumisawa, Masaru

AU - Yoshioka, Hironori

AU - Ogura, Tsuneo

PY - 2004

Y1 - 2004

N2 - Superjunction (SJ) MOSFETs with extremely low on-resistance and high avalanche withstanding capability have been designed and experimentally demonstrated. The p- and n-columns for the SJ structure are designed to reduce the on-resistance and to maximize both the breakdown voltage and the avalanche withstanding capability. The demonstrated SJ-MOSFET realized the lowest on-resistance of 20∼mΩcm2 among previously reported 600 V-class SJ-MOSFETs. The device also withstands high avalanche current of 185∼A/cm2.

AB - Superjunction (SJ) MOSFETs with extremely low on-resistance and high avalanche withstanding capability have been designed and experimentally demonstrated. The p- and n-columns for the SJ structure are designed to reduce the on-resistance and to maximize both the breakdown voltage and the avalanche withstanding capability. The demonstrated SJ-MOSFET realized the lowest on-resistance of 20∼mΩcm2 among previously reported 600 V-class SJ-MOSFETs. The device also withstands high avalanche current of 185∼A/cm2.

UR - http://www.scopus.com/inward/record.url?scp=4944221738&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=4944221738&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:4944221738

SP - 459

EP - 462

T2 - Proceedings of the 16th International Symposium on Power Semiconductor Devices and ICs (ISPSD'04)

Y2 - 24 May 2004 through 27 May 2004

ER -

A 20mΩcm² 600 V-class super junction MOSFET

Abstract

Conference

All Science Journal Classification (ASJC) codes

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