3D nanoarchitecture from ultrathin titania film via surface sol-gel process and photolithography

Shigenori Fujikawa; Toyoki Kunitake

doi:10.1246/cl.2005.1414

3D nanoarchitecture from ultrathin titania film via surface sol-gel process and photolithography

Shigenori Fujikawa, Toyoki Kunitake

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

We demonstrated the fabrication of 3D nano-architectures composed of ultrathin TiO₂-gel (titania) layers. Titania films with a thickness of a few tens nanometers are prepared on lithographically-fabricated line and hole patterns by the surface sol-gel process. Oxygen plasma treatment is employed to remove the template moiety, and gives positive replicas of the template structures.

Original language	English
Pages (from-to)	1414-1415
Number of pages	2
Journal	Chemistry Letters
Volume	34
Issue number	10
DOIs	https://doi.org/10.1246/cl.2005.1414
Publication status	Published - Oct 5 2005
Externally published	Yes

All Science Journal Classification (ASJC) codes

Chemistry(all)

Access to Document

10.1246/cl.2005.1414

Cite this

@article{ab018b6e86d34350a4057c21c01a1bc8,

title = "3D nanoarchitecture from ultrathin titania film via surface sol-gel process and photolithography",

abstract = "We demonstrated the fabrication of 3D nano-architectures composed of ultrathin TiO2-gel (titania) layers. Titania films with a thickness of a few tens nanometers are prepared on lithographically-fabricated line and hole patterns by the surface sol-gel process. Oxygen plasma treatment is employed to remove the template moiety, and gives positive replicas of the template structures.",

author = "Shigenori Fujikawa and Toyoki Kunitake",

year = "2005",

month = oct,

day = "5",

doi = "10.1246/cl.2005.1414",

language = "English",

volume = "34",

pages = "1414--1415",

journal = "Chemistry Letters",

issn = "0366-7022",

publisher = "The Chemical Society of Japan",

number = "10",

}

TY - JOUR

T1 - 3D nanoarchitecture from ultrathin titania film via surface sol-gel process and photolithography

AU - Fujikawa, Shigenori

AU - Kunitake, Toyoki

PY - 2005/10/5

Y1 - 2005/10/5

N2 - We demonstrated the fabrication of 3D nano-architectures composed of ultrathin TiO2-gel (titania) layers. Titania films with a thickness of a few tens nanometers are prepared on lithographically-fabricated line and hole patterns by the surface sol-gel process. Oxygen plasma treatment is employed to remove the template moiety, and gives positive replicas of the template structures.

AB - We demonstrated the fabrication of 3D nano-architectures composed of ultrathin TiO2-gel (titania) layers. Titania films with a thickness of a few tens nanometers are prepared on lithographically-fabricated line and hole patterns by the surface sol-gel process. Oxygen plasma treatment is employed to remove the template moiety, and gives positive replicas of the template structures.

UR - http://www.scopus.com/inward/record.url?scp=29344432135&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=29344432135&partnerID=8YFLogxK

U2 - 10.1246/cl.2005.1414

DO - 10.1246/cl.2005.1414

M3 - Article

AN - SCOPUS:29344432135

SN - 0366-7022

VL - 34

SP - 1414

EP - 1415

JO - Chemistry Letters

JF - Chemistry Letters

IS - 10

ER -

3D nanoarchitecture from ultrathin titania film via surface sol-gel process and photolithography

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this