2.4GHz SAW filters using AlN deposited on off-angle R-plane sapphire substrates by MOCVD

Tomohiko Shibata; Yuji Hori; Keiichiro Asai; Yukinori Nakamura; Mitsuhiro Tanaka; Kazuyuki Kaigawa; Junko Shibata; Hiroaki Sakai

2.4GHz SAW filters using AlN deposited on off-angle R-plane sapphire substrates by MOCVD

Tomohiko Shibata, Yuji Hori, Keiichiro Asai, Yukinori Nakamura, Mitsuhiro Tanaka, Kazuyuki Kaigawa, Junko Shibata, Hiroaki Sakai

Research output: Contribution to journal › Conference article › peer-review

10 Citations (Scopus)

Abstract

A-plane AlN films deposited on off-angle R-plane sapphire substrates, in which a surface plane was tilted towards [1-101] sapphire direction, were shown to be effective in restraining the generation of inverted twins. Surface acoustic wave (SAW) filters at 2.4 GHz were reliably made using the optimized AlN on the off-angle sapphire substrate. 2.4GHz spread spectrum (SS) signals were able to be directly demodulated to baseband data using the optimized front-end SAW matched filter (MF) and delay line (DL) on the AlN.

Original language	English
Pages (from-to)	287-292
Number of pages	6
Journal	Proceedings of the IEEE Ultrasonics Symposium
Volume	1
Publication status	Published - 2000
Externally published	Yes
Event	2000 IEEE Ultasonics Symposium - San Juan, Puerto Rico Duration: Oct 22 2000 → Oct 25 2000

All Science Journal Classification (ASJC) codes

Acoustics and Ultrasonics

Cite this

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title = "2.4GHz SAW filters using AlN deposited on off-angle R-plane sapphire substrates by MOCVD",

abstract = "A-plane AlN films deposited on off-angle R-plane sapphire substrates, in which a surface plane was tilted towards [1-101] sapphire direction, were shown to be effective in restraining the generation of inverted twins. Surface acoustic wave (SAW) filters at 2.4 GHz were reliably made using the optimized AlN on the off-angle sapphire substrate. 2.4GHz spread spectrum (SS) signals were able to be directly demodulated to baseband data using the optimized front-end SAW matched filter (MF) and delay line (DL) on the AlN.",

author = "Tomohiko Shibata and Yuji Hori and Keiichiro Asai and Yukinori Nakamura and Mitsuhiro Tanaka and Kazuyuki Kaigawa and Junko Shibata and Hiroaki Sakai",

year = "2000",

language = "English",

volume = "1",

pages = "287--292",

journal = "Proceedings of the IEEE Ultrasonics Symposium",

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note = "2000 IEEE Ultasonics Symposium ; Conference date: 22-10-2000 Through 25-10-2000",

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TY - JOUR

T1 - 2.4GHz SAW filters using AlN deposited on off-angle R-plane sapphire substrates by MOCVD

AU - Shibata, Tomohiko

AU - Hori, Yuji

AU - Asai, Keiichiro

AU - Nakamura, Yukinori

AU - Tanaka, Mitsuhiro

AU - Kaigawa, Kazuyuki

AU - Shibata, Junko

AU - Sakai, Hiroaki

PY - 2000

Y1 - 2000

N2 - A-plane AlN films deposited on off-angle R-plane sapphire substrates, in which a surface plane was tilted towards [1-101] sapphire direction, were shown to be effective in restraining the generation of inverted twins. Surface acoustic wave (SAW) filters at 2.4 GHz were reliably made using the optimized AlN on the off-angle sapphire substrate. 2.4GHz spread spectrum (SS) signals were able to be directly demodulated to baseband data using the optimized front-end SAW matched filter (MF) and delay line (DL) on the AlN.

AB - A-plane AlN films deposited on off-angle R-plane sapphire substrates, in which a surface plane was tilted towards [1-101] sapphire direction, were shown to be effective in restraining the generation of inverted twins. Surface acoustic wave (SAW) filters at 2.4 GHz were reliably made using the optimized AlN on the off-angle sapphire substrate. 2.4GHz spread spectrum (SS) signals were able to be directly demodulated to baseband data using the optimized front-end SAW matched filter (MF) and delay line (DL) on the AlN.

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M3 - Conference article

AN - SCOPUS:0034579671

SN - 1051-0117

VL - 1

SP - 287

EP - 292

JO - Proceedings of the IEEE Ultrasonics Symposium

JF - Proceedings of the IEEE Ultrasonics Symposium

T2 - 2000 IEEE Ultasonics Symposium

Y2 - 22 October 2000 through 25 October 2000

ER -

2.4GHz SAW filters using AlN deposited on off-angle R-plane sapphire substrates by MOCVD

Abstract

All Science Journal Classification (ASJC) codes

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