@inproceedings{0ce8fd67841645e38d53f6a584ae8afa,
title = "100 GHz Thin-Film LNOI/Si Optical Modulator Fabricated by Room Temperature Wafer Bonding",
abstract = "This paper demonstrated 100 GHz thin-film LNOI/Si optical modulator fabricated by room temperature wafer bonding with activated Si atomic layer.",
author = "Seigo Murakami and Yoshiki Katoda and Yuya Yamaguchi and Takahide Sakamoto and Ryo Takigawa",
note = "Publisher Copyright: {\textcopyright} 2024 IEEE.; 8th International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2024 ; Conference date: 30-10-2024 Through 01-11-2024",
year = "2024",
doi = "10.1109/LTB-3D64053.2024.10774132",
language = "English",
series = "2024 8th International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2024",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2024 8th International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2024",
address = "United States",
}